Optical waveguide based on oxidized porous silicon
- 30 June 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 28 (1-4), 447-450
- https://doi.org/10.1016/0167-9317(95)00094-o
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Photoluminescence of Anodically Oxidized Porous SiliconPhysica Status Solidi (b), 1994
- Highly sensitive photodetector using porous siliconApplied Physics Letters, 1992
- The kinetics and mechanism of oxide layer formation from porous silicon formed on p-Si substratesJournal of Applied Physics, 1987
- Heat treatment effect on porous siliconThin Solid Films, 1986
- Optical studies of the structure of porous silicon films formed in p-type degenerate and non-degenerate siliconJournal of Physics C: Solid State Physics, 1984