Characteristic Change due to Argon Ion Etching and Heat Treatment of (Pb, La)TiO3 Thin Films Fabricated by Multiple Cathode Sputtering

Abstract

The ferroelectric properties of (Pb, La)TiO₃ thin films fabricated by multiple cathode rf-magnetron sputtering were investigated. After argon ion etching of the (Pb, La)TiO₃ thin films, the reduction of Pb-O bonds, shift of hysteresis loop on the E-axis and the decrease of remanent polarization was induced. After heat treatment at 700° C in N₂, squareness and saturation of the loop worsened, and remanent polarization decreased. After reheat treatment of the films at 400° C for 1 h, the coercive field decreased, and the squareness of the loop was improved. These results were discussed from the viewpoint of the behavior of space charge.