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Vertically structured silicon membrane by electrochemical etching
Home
Publications
Vertically structured silicon membrane by electrochemical etching
Vertically structured silicon membrane by electrochemical etching
RH
R. Huster
R. Huster
AS
A. Stoffel
A. Stoffel
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30 April 1990
journal article
Published by
Elsevier
in
Sensors and Actuators A: Physical
Vol. 23
(1-3)
,
899-903
https://doi.org/10.1016/0924-4247(90)87055-n
Abstract
No abstract available
Keywords
CRYSTAL
ELECTROCHEMICAL ETCHING
STOP
IMPLANTATION
CONTOURS
STRUCTURED
THICK
RIMS
Cited by 19 articles