Applications of fluorocarbon polymers in micromechanics and micromachining
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 41 (1-3), 136-140
- https://doi.org/10.1016/0924-4247(94)80101-0
Abstract
No abstract availableKeywords
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- Mechanisms of deposition and etching of thin films of plasma-polymerized fluorinated monomers in radio frequency discharges fed with C2F6-H2 and C2F6-O2 mixturesJournal of Applied Physics, 1987