Sensitivity limitations in the analysis of semiconductor devices with auger electron spectrometry (AES) and secondary ion mass spectrometry (SIMS)
- 1 January 1983
- journal article
- research article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 314 (3), 293-299
- https://doi.org/10.1007/bf00516823
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- SIMS instrumentation and imaging techniquesScanning, 1980
- High-resolution sputter depth profiling with a low pressure hf plasmaApplied Physics A, 1979
- The use of secondary ion mass spectrometry for studies of oxygen adsorption and oxidationSurface Science, 1977
- A method of background determination in quantitative auger spectroscopyApplied Physics A, 1976