Sputtering of polycrystalline metals by inert gas ions of low energy (100–1000 eV)

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31 August 1961

journal article
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Published by Elsevier in Physica

Vol. 27 (8), 763-764
https://doi.org/10.1016/0031-8914(61)90093-3

Abstract

No abstract available

This publication has 2 references indexed in Scilit:

Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev
Journal of Applied Physics, 1961
Sputtering of a polycristalline silver surface bombarded with monoenergetic argon ions of low energy (40–240 eV)
Physica, 1958

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