Epitaxial Growth of Silicon by Vacuum Evaporation
- 1 June 1962
- journal article
- Published by Springer Nature in Nature
- Vol. 194 (4832), 966-967
- https://doi.org/10.1038/194966a0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Improved electron gun for zone-melting bombardmentBritish Journal of Applied Physics, 1961
- Epitaxial Silicon Films by the Hydrogen Reduction of SiCl[sub 4]Journal of the Electrochemical Society, 1961
- Diffusion of Donor and Acceptor Elements in SiliconJournal of Applied Physics, 1956