High spatial resolution diagnostics of optical waveguides using a photon-scanning tunneling microscope
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 7 (1), 84-86
- https://doi.org/10.1109/68.363368
Abstract
We propose a high-resolution diagnostics technique for optical waveguides using a photon-scanning tunneling microscope (P-STM). This technique has the advantageous capabilities of nondestructive measurement and informative analysis of guided mode. The capability of this technique was evaluated by measuring the characteristics of an LiTaO/sub 3/ waveguide. Scattered light spot of 500-nm diameter caused by defects was measured, and a normalized width was estimated to be 3.7 /spl mu/m. Moreover, we obtained the power dispersion in Y-branch waveguides, which were in good agreement with the theoretical plots calculated by the beam propagation method (BPM).Keywords
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