Low-loss optical waveguides using plasma-deposited silicon nitride
- 1 December 1983
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 22 (23), 3664-3665
- https://doi.org/10.1364/ao.22.003664
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Silicon nitride films on silicon for optical waveguidesApplied Optics, 1977
- Light Waves in Thin Films and Integrated OpticsApplied Optics, 1971