Polymolding: Two Wafer Polysilicon Micromolding of Closed-Flow Passages for Microneedles and Microfluidic Devices
- 8 June 1998
- proceedings article
- Published by Transducer Research Foundation Inc. (TRF)
- p. 265-268
- https://doi.org/10.31438/trf.hh1998.60