Observations of standing waves on an inductive plasma coil modeled as a uniform transmission line
- 1 September 1997
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 15 (5), 2615-2622
- https://doi.org/10.1116/1.580781
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Two-dimensional modeling of high plasma density inductively coupled sources for materials processingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Novel radio-frequency induction plasma processing techniquesJournal of Vacuum Science & Technology A, 1993
- A simple analysis of an inductive RF dischargePlasma Sources Science and Technology, 1992