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A novel induction heater for chemical vapor deposition
Home
Publications
A novel induction heater for chemical vapor deposition
A novel induction heater for chemical vapor deposition
C. W. Ong
C. W. Ong
HW
H. K. Wong
H. K. Wong
KS
K. S. Sin
K. S. Sin
SY
S. T. Yip
S. T. Yip
KC
K. P. Chik
K. P. Chik
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1 June 1989
journal article
Published by
AIP Publishing
in
Review of Scientific Instruments
Vol. 60
(6)
,
1174-1176
https://doi.org/10.1063/1.1140281
Abstract
No abstract available
Keywords
SAMPLE PREPARATION
TEMPERATURE CONTROL
Cited by 3 articles