Ion-solid interactions during ion beam deposition of 74Ge and 30Si on Si at very low ion energies (0–200 eV range)
- 1 March 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 13 (1-3), 250-258
- https://doi.org/10.1016/0168-583x(86)90512-4
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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