Planar VPE infill 1.3 μm integrated laser/monitor photodiode with CARIBE etched facets

Abstract

We report the preparation of a novel, planar VPE infill 1.3 μm laser featuring an integrated monitor photodiode. The rear laser and front photodiode facets were formed by chemically assisted reactive ion beam etching (CARIBE). Threshold currents were as low as 17 mA with efficiencies up to 17% per facet. The laser/monitor photodiode sensitivity was ~5 μA/mW.