Direct etching of polymeric materials using a XeCl laser
- 15 October 1983
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 43 (8), 717-719
- https://doi.org/10.1063/1.94488
Abstract
The direct etching of polyethylene terephthalate film using a XeCl laser has been investigated and is shown to be consistent with a thermal model for degradation. Microstructure revealed by deep etching suggests the UV laser may prove useful for studying polymeric materials. Polyimide and photoresist film has also been directly etched.Keywords
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