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Micro-optical elements and their integration to glass and optoelectronic wafers
Home
Publications
Micro-optical elements and their integration to glass and optoelectronic wafers
Micro-optical elements and their integration to glass and optoelectronic wafers
PD
P. Dannberg
P. Dannberg
LE
L. Erdmann
L. Erdmann
RB
R. Bierbaum
R. Bierbaum
AK
A. Krehl
A. Krehl
AB
A. Bräuer
A. Bräuer
EK
E. B. Kley
E. B. Kley
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17 December 1999
journal article
Published by
Springer Nature
in
Microsystem Technologies
Vol. 6
(2)
,
41-47
https://doi.org/10.1007/s005420050173
Abstract
No abstract available
Keywords
SILICON
OPTOELECTRONIC
INORGANIC
POLYMER
MOULDING AGAINST INJECTION
COATED WITH OPTICAL
STRUCTURE IS TRANSFORMED
REPLICATION
SHRINKAGE
Cited by 29 articles