Nitride film formation by ion and vapour deposition
- 1 March 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 7-8, 910-914
- https://doi.org/10.1016/0168-583x(85)90493-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Formation of Cubic Boron Nitride Films by Boron Evaporation and Nitrogen Ion Beam BombardmentJapanese Journal of Applied Physics, 1983
- Theoretical studies on an empirical formula for sputtering yield at normal incidenceRadiation Effects, 1983
- Ion beam deposition of special film structuresJournal of Vacuum Science and Technology, 1981
- Structure and properties of quasi-amorphous films prepared by ion beam techniquesThin Solid Films, 1980
- Normal Modes in Hexagonal Boron NitridePhysical Review B, 1966