Automating inspection of aluminum circuit pattern of LSI wafers
- 1 January 1987
- journal article
- research article
- Published by Wiley in Electronics and Communications in Japan (Part II: Electronics)
- Vol. 70 (3), 46-58
- https://doi.org/10.1002/ecjb.4420700305
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Automation of Visual Inspection of LSI Photomask Patterns by Comparing Extracted Local Features of PatternTransactions of the Society of Instrument and Control Engineers, 1983