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Effect of frequency from 'low frequency' to microwave on the plasma deposition of thin films
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Publications
Effect of frequency from 'low frequency' to microwave on the plasma deposition of thin films
Effect of frequency from 'low frequency' to microwave on the plasma deposition of thin films
MW
M. R. Wertheimer
M. R. Wertheimer
MM
M. Moisan
M. Moisan
JK
J. E. Klemberg-Sapieha
J. E. Klemberg-Sapieha
RC
R. Claude
R. Claude
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1 January 1988
journal article
Published by
Walter de Gruyter GmbH
Vol. 60
(5)
,
815-820
https://doi.org/10.1351/pac198860050815
Abstract
No abstract available
Cited by 11 articles