Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Printing meets lithography: Soft approaches to high-resolution patterning
Home
Publications
Printing meets lithography: Soft approaches to high-resolution patterning
Printing meets lithography: Soft approaches to high-resolution patterning
BM
B. Michel
B. Michel
AB
A. Bernard
A. Bernard
AB
A. Bietsch
A. Bietsch
E. Delamarche
E. Delamarche
M. Geissler
M. Geissler
D. Juncker
D. Juncker
HK
H. Kind
H. Kind
J.-P. Renault
J.-P. Renault
HR
H. Rothuizen
H. Rothuizen
HS
H. Schmid
H. Schmid
PS
P. Schmidt-Winkel
P. Schmidt-Winkel
RS
R. Stutz
R. Stutz
See more
Top Cited Papers
Publisher Website
Google Scholar
Add to Library
Cite
Download
Share
Download
1 September 2001
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 45
(5)
,
697-719
https://doi.org/10.1147/rd.455.0697
Abstract
No abstract available
Keywords
RESOLUTION PATTERNS
METROLOGY
OPTICAL LITHOGRAPHY
HIGH RESOLUTION PATTERNING
HIGH RESOLUTION PRINTING
STAMP
Cited by 408 articles