Abstract
The self‐diffusion preexponential factor D0=8.0 cm2/s and activation energy Q=4.1 eV for intrinsic silicon have been determined with the ( p,γ) resonance broadening method in the temperature region 900–1100 °C, in a first application of this method to self‐diffusion measurements. Its suitability was tested by extending the self‐diffusion measurements to lower temperatures than those performed with other methods.