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Application of RF Discharges to Sputtering
Home
Publications
Application of RF Discharges to Sputtering
Application of RF Discharges to Sputtering
HK
H. R. Koenig
H. R. Koenig
LM
L. I. Maissel
L. I. Maissel
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1 March 1970
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 14
(2)
,
168-171
https://doi.org/10.1147/rd.142.0168
Abstract
No abstract available
Cited by 247 articles