A supervised simulation system for process and device designs based on a geometrical data interface

Abstract

A supervised simulation system for two-dimensional simulation has been developed covering the range from pattern layout to process simulation and also to device simulation. The system features a system controller for module programs, and the feasibility of module programs based on an intermediate topography data format with which data go between the module programs. The system controller can automatically generate appropriate jobs, assigning pertinent input data. The topography data acts as an interface through process simulation and up to device simulation. The system will eliminate laborious work for designers and greatly reduce the time required for process and device designs.