Junction depth measurement by spherical contouring
- 31 July 1968
- journal article
- research article
- Published by Elsevier in Solid-State Electronics
- Vol. 11 (7), 711-712
- https://doi.org/10.1016/0038-1101(68)90075-0
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Spherical drilling a new method for the measurement of junction depths in semiconductor devicesSolid-State Electronics, 1967
- Measurement of the Depth of Diffused Layers in Silicon by the Grooving MethodJournal of the Electrochemical Society, 1962