Structure Analysis of the NiSi2/(111)Si Interface by the X-Ray Standing Wave Method

Abstract
The atomic structure of the NiSi2/(111)Si interface was investigated by the X-ray standing wave method using synchrotron radiation at Photon Factory. The angular yield of Ni K fluorescent X-rays was measured around the Bragg peak of a substrate Si. By comparing the profile of the experimental curve with that of calculated one, the interface atomic structure was determined.