Vertically coupled microring resonators using polymer wafer bonding
- 1 January 2001
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 13 (1), 49-51
- https://doi.org/10.1109/68.903217
Abstract
A new technique is presented to make vertically coupled semiconductor microring resonators that eases the fabrication process with devices more robust to ring-to-waveguide misalignments. Single-mode microring optical channel dropping filters are demonstrated for the first time in this configuration with Qs greater than 3000 and an on-resonance channel extinction greater than 12 dB. A 1/spl times/4 multiplexer/demultiplexer crossbar array with second-order microrings was also made and exhibited channel-to-channel crosstalk lower than 10 dB.Keywords
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