Laser stimulated scattering microscope: A tool for investigating modified metallic surfaces
- 1 March 1993
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 64 (3), 618-622
- https://doi.org/10.1063/1.1144186
Abstract
An instrument, based on the principle of microscopic measurements using transient reflecting gratings, has been built for investigation of modified metallic surfaces. After holographic illumination of focused light pulses of short duration, dynamic processes are observed by detecting the reflecting diffraction of the synchronously delayed probe pulse, while the sample is two‐dimensionally scanned. Distribution imaging and relaxation time (or diffusivity) imaging are demonstrated for ion‐implanted silicon wafers.Keywords
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