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Infrared Detector Based On An Integrated Silicon Thermopile
Home
Publications
Infrared Detector Based On An Integrated Silicon Thermopile
Infrared Detector Based On An Integrated Silicon Thermopile
PS
P. M. Sarro
P. M. Sarro
AH
A. W. Herwaarden
A. W. Herwaarden
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10 September 1987
proceedings article
Published by
SPIE-Intl Soc Optical Eng
https://doi.org/10.1117/12.941446
Abstract
No abstract available
Keywords
SILICON
SENSORS
MICROMACHINING
BLACK BODIES
Cited by 7 articles