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Early stages of silicon oxidation
Home
Publications
Early stages of silicon oxidation
Early stages of silicon oxidation
V. J. B. Torres
V. J. B. Torres
AS
A. M. Stoneham
A. M. Stoneham
CS
C. J. Sofield
C. J. Sofield
A. H. Harker
A. H. Harker
CC
C. F. Clement
C. F. Clement
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1 January 1995
journal article
research article
Published by
Springer Nature
in
Interface Science
Vol. 3
(2)
,
133-141
https://doi.org/10.1007/bf00207015
Abstract
No abstract available
Keywords
SILICON
SI/OXIDE INTERFACE
OXIDATION
MONTE-CARLO
THIN-FILMS
Cited by 13 articles