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Crystallographic aspects of thin PtSi films on Si substrates
Home
Publications
Crystallographic aspects of thin PtSi films on Si substrates
Crystallographic aspects of thin PtSi films on Si substrates
BR
B. P. Richards
B. P. Richards
IS
I. H. Scobey
I. H. Scobey
CW
C. A. Wallace
C. A. Wallace
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1 April 1974
journal article
Published by
International Union of Crystallography (IUCr)
in
Journal of Applied Crystallography
Vol. 7
(2)
,
275-280
https://doi.org/10.1107/s0021889874009526
Abstract
No abstract available
Keywords
SI SUBSTRATES
SILICIDE
OHMIC CONTACT
SINTERING
STRUCTURAL CHARACTERISTICS
PTSI
SUBSTRATE TEMPERATURE
MODERATELY ORIENTED
Cited by 5 articles