Electron traps in AlGaAs grown by molecular-beam epitaxy
- 1 June 1987
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (11), 5062-5069
- https://doi.org/10.1063/1.338330
Abstract
Using deep‐level transient capacitance spectroscopy we have investigated deep electron traps in n‐AlGaAs grown by molecular‐beam epitaxy (MBE). The thermal activation energies of seven traps, labeled ME1–ME7, observed in this study increase with increasing Al content(x) up to the direct‐indirect crossover point (x∼0.42), but show only a small change with further increases in Al content. Traps ME4–ME7 are dominant in samples with x≤0.2. Traps ME4–ME6 strongly depend on the growth ambient. The concentration of ME7 is almost independent of the ambient in the growth chamber but decreases rapidly with increasing growth temperature. ME7 is a native defect and can almost certainly be identified with the trap EL2 observed in bulk and vapor‐phase epitaxially grown GaAs. Traps ME4–ME6 are probably formed by impurities involving oxygen such as CO, H2O, and AsO in the growth ambient. All of the traps, ME5–ME7 are clearly responsible for a decrease in the photoluminescence intensity of MBE grown AlGaAs.Keywords
This publication has 25 references indexed in Scilit:
- Gallium Vacancy and2 in GaAsPhysical Review Letters, 1986
- On the Physical Origins of the EL2 Center in GaAsJournal of the Electrochemical Society, 1986
- Bistability and Metastability of the Gallium Vacancy in GaAs: The Actuator of2?Physical Review Letters, 1985
- Effect of Arsenic Source on Electron Trap Concentrations in MBE-Grown Al0.2Ga0.8AsJapanese Journal of Applied Physics, 1985
- Effects of Growth Conditions on Electron Trap Concentrations in Si-Doped Al0.2Ga0.8As Grown by MBEJapanese Journal of Applied Physics, 1984
- The effect of non-exponential transients on the determination of deep-trap activation energies by deep-level transient spectroscopyJournal of Physics C: Solid State Physics, 1979
- Trapping characteristics and a donor-complex () model for the persistent-photoconductivity trapping center in Te-dopedPhysical Review B, 1979
- Strongly anisotropic field ionization of a common deep level in GaAsJournal de Physique Lettres, 1979
- Measurement of MIS capacitors with oxygen-doped AlxGa1−xAs insulating layers on GaAsJournal of Vacuum Science and Technology, 1978
- Properties of vacancy defects in GaAs single crystalsJournal of Applied Physics, 1975