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Room-temperature backbond oxidation of the porous silicon surface by oxygen radical irradiation
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Room-temperature backbond oxidation of the porous silicon surface by oxygen radical irradiation
Room-temperature backbond oxidation of the porous silicon surface by oxygen radical irradiation
PO
Patrick O’keeffe
Patrick O’keeffe
YA
Yoshinobu Aoyagi
Yoshinobu Aoyagi
SK
Shuji Komuro
Shuji Komuro
TK
Takashi Kato
Takashi Kato
TM
Takitaro Morikawa
Takitaro Morikawa
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13 February 1995
journal article
Published by
AIP Publishing
in
Applied Physics Letters
Vol. 66
(7)
,
836-838
https://doi.org/10.1063/1.113438
Abstract
No abstract available
Keywords
FOURIER TRANSFORM INFRARED SPECTROSCOPY
INFRARED SPECTRA
ELECTRON CYCLOTRON RESONANCE
ROOM TEMPERATURE
Cited by 45 articles