Lattice Mismatch Study of LPE‐Grown InGaPAs on ( 001 ) ‐ InP Using X‐Ray Double‐Crystal Diffraction

Abstract

The lattice mismatch in epilayers grown on substrates in the direction perpendicular as well as parallel to the heterointerface has been investigated by means of x‐ray double crystal diffractometry. The lattice parameters in the [001] growth direction varies along the quaternary layer thickness while no lattice‐mismatch in the lateral direction is observed. Large half‐value widths of the x‐ray rocking curve of the quaternary layer are found to be attributed to the parameter variations along the thickness.