A triangular electrostatic comb array for micromechanical resonant frequency tuning
- 1 October 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 70 (1-2), 112-117
- https://doi.org/10.1016/s0924-4247(98)00122-8
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- A surface micromachined capacitive absolute pressure sensor array on a glass substrateSensors and Actuators A: Physical, 1995
- Electrostatic Comb Drive Levitation And Control MethodJournal of Microelectromechanical Systems, 1992
- Laterally Driven Polysilicon Resonant MicrostructuresSensors and Actuators, 1989
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985