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PRISM: Process for resist profile improvement with surface modification
Home
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PRISM: Process for resist profile improvement with surface modification
PRISM: Process for resist profile improvement with surface modification
TY
Toshiyuki Yoshimura
Toshiyuki Yoshimura
FM
Fumio Murai
Fumio Murai
HS
Hiroshi Shiraishi
Hiroshi Shiraishi
SO
Shinji Okazaki
Shinji Okazaki
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1 November 1988
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 6
(6)
,
2249-2253
https://doi.org/10.1116/1.584091
Abstract
No abstract available
Cited by 6 articles