Phase separation in silicon oxides as seen by Auger electron spectroscopy
- 15 October 1975
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 27 (8), 452-454
- https://doi.org/10.1063/1.88523
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Auger parameter in electron spectroscopy for the identification of chemical speciesAnalytical Chemistry, 1975
- An analysis of the radial distribution function of SIOxJournal of Non-Crystalline Solids, 1975
- Electron mean escape depths from x−ray photoelectron spectra of thermally oxidized silicon dioxide films on siliconJournal of Vacuum Science and Technology, 1975
- Optical and bonding model for non-crystalline SiOx and SiOxNy materialsJournal of Non-Crystalline Solids, 1972
- The Structure of Silicon Oxide FilmsPhysica Status Solidi (b), 1967