Optical communication using micro corner cube reflectors
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. a47, 350-355
- https://doi.org/10.1109/memsys.1997.581852
Abstract
Surface micromachined corner cube reflectors made of250?￥m square hinged polysilicon plates have been demonstratedto transmit digital signals over a range of 2 metersby reflecting an interrogating 5mW laser. Measuredreflectance ranges from 34% to 77% for different mirror designs.Divergence of light reflected by CCR ranges from15-35mrad. The CCRs are electrostatically actuated with10 to 20V. The highest data rate transmitted with a CCRis 1K bps.INTRODUCTIONZwirn proposed using a MEMS...Keywords
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