MEMS device for bending test: measurements of fatigue and creep of electroplated nickel
- 13 December 2002
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 103 (1-2), 156-164
- https://doi.org/10.1016/s0924-4247(02)00306-0
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- Pulse and DC operation lifetimes of bent-beam electrothermal actuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Tensile-mode fatigue testing of silicon films as structural materials for MEMSSensors and Actuators A: Physical, 2001
- Microscale materials testing using MEMS actuatorsJournal of Microelectromechanical Systems, 2001
- Fracture strength and fatigue of polysilicon determined by a novel thermal actuator [MEMS]IEEE Transactions on Electron Devices, 2000
- Fatigue Tests of Ni–P Amorphous Alloy Microcantilever BeamsJapanese Journal of Applied Physics, 1999
- Measurement of mechanical properties for MEMS materialsMeasurement Science and Technology, 1999
- Mechanical properties of nanocrystalline nickel produced by electrodepositionNanostructured Materials, 1999
- Mechanical Properties of Thin FilmsAnnual Review of Materials Science, 1990
- Mechanical properties of thin filmsMetallurgical Transactions A, 1989
- The mechanical properties of thin films: A reviewThin Solid Films, 1987