An integrated capacitive pressure sensor with frequency-modulated output
- 31 July 1986
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 9 (4), 345-351
- https://doi.org/10.1016/0250-6874(86)80066-x
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- A piezoresistive integrated pressure sensorSensors and Actuators, 1983
- A high-sensitivity integrated-circuit capacitive pressure transducerIEEE Transactions on Electron Devices, 1982
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979