Investigation of Hydrogen and Nitrogen Thermal Stability in PECVD a-Sinx:H.
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
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- Performance of thin hydrogenated amorphous silicon thin-film transistorsJournal of Applied Physics, 1991
- Infrared absorption and thermal evolution study of hydrogen bonding in a-SiHJournal of Vacuum Science & Technology A, 1989
- Thermal desorption of gasesVacuum, 1962