Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Electron-beam investigation and use of Ge–Se inorganic resist
Home
Publications
Electron-beam investigation and use of Ge–Se inorganic resist
Electron-beam investigation and use of Ge–Se inorganic resist
AC
A. S. Chen
A. S. Chen
GA
G. Addiego
G. Addiego
WL
W. Leung
W. Leung
AN
A. R. Neureuther
A. R. Neureuther
Publisher Website
Google Scholar
Add to Library
Cite
Download
Share
Download
1 January 1986
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 4
(1)
,
398-402
https://doi.org/10.1116/1.583342
Abstract
No abstract available
Cited by 7 articles