Kinetics of Oxygen Atom Production in R.F. Discharges of Moderate Pressures
- 1 January 1978
- journal article
- research article
- Published by Wiley in Contributions to Plasma Physics
- Vol. 18 (5), 301-315
- https://doi.org/10.1002/ctpp.19780180503
Abstract
No abstract availableKeywords
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