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Ion Implantation in GaAs
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Ion Implantation in GaAs
Ion Implantation in GaAs
SP
Stephen J. Pearton
Stephen J. Pearton
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1 January 1991
journal article
Published by
Trans Tech Publications, Ltd.
in
Solid State Phenomena
Vol. 1-2
,
247-280
https://doi.org/10.4028/www.scientific.net/ssp.1-2.247
Abstract
No abstract available
Keywords
ION IMPLANTATION
Cited by 41 articles