General aspects of barrier layers for very-large-scale integration applications II: Practice
- 1 October 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 96 (4), 317-326
- https://doi.org/10.1016/0040-6090(82)90515-6
Abstract
No abstract availableThis publication has 29 references indexed in Scilit:
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