Structural studies of reactively sputtered carbon nitride thin films
- 1 February 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 256 (1-2), 44-47
- https://doi.org/10.1016/0040-6090(94)06294-3
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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