Low energy ion backscattering spectroscopy (ISS) with a commercial Auger cylindrical mirror analyzer (CMA)
- 1 September 1975
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 46 (9), 1275-1277
- https://doi.org/10.1063/1.1134417
Abstract
A commercial Auger CMA is used alternately for AES and ISS experiments by simple changes of the deflection and secondary electron multiplier voltages. A retractable movable aperture between CMA and target defines the scattering angle. ISS measurements on W(110) surfaces show that in the chosen experimental arrangement less than 6% of all ions entering the CMA are scattered out of the plane of incidence of the ion beam. Thus no aperture is necessary for routine investigations which allows rapid switchover from AES to ISS.Keywords
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