Synthesis of Diamond Thin Films Having Semiconductive Properties
- 1 February 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (2A), L173
- https://doi.org/10.1143/jjap.27.l173
Abstract
Semiconductive diamond films were fabricated by the thermal filament CVD method. A saturated solution of B2O3 powder in CH3OH mixed with acetone was used. The films deposited were identified as diamond by several methods including Raman spectroscopy. By the measurement of electrical properties, the obtained films were found to show p-type conduction.Keywords
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