Versatile computer programs for analysis of random and channeling backscattering spectra
- 1 February 1987
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 61 (3), 956-961
- https://doi.org/10.1063/1.338148
Abstract
Two types of computer programs have been developed to simulate random and channeling backscattering spectra with high speed. One is applicable to analysis of multielemental and multilayered structures. Depth profiles of interdiffusion and of impurities distributed inhomogeneously can be analyzed simultaneously with this program. Another allows the simulation of channeling spectrum from a perfect or partially damaged single crystal whose top surface consists of an amorphous layer with an arbitrary thickness. These simulation programs are applied to determine the thicknesses of the ten-layered structure of Ag/Al/Ag/.../Al, the mixing rates for the Al/Sb system irradiated with Xe ions, and the damage profile of GaP induced by Ar+ irradiation.Keywords
This publication has 8 references indexed in Scilit:
- Projected range and damage distributions in ion-implanted Al, Si, Al2O3, and GaAsJournal of Applied Physics, 1985
- Analysis of ion-implanted surface and interface structures by computer-simulated backscattering spectraJournal of Applied Physics, 1985
- Interactive computer analysis of nuclear backscattering spectraNuclear Instruments and Methods in Physics Research, 1983
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Calculation of energy straggling for protons and helium ionsPhysical Review A, 1976
- An analytic solution to elastic backscatteringJournal of Applied Physics, 1975
- Depth Profiles of the Lattice Disorder Resulting from Ion Bombardment of Silicon Single CrystalsJournal of Applied Physics, 1970
- LX. On the decrease of velocity of swiftly moving electrified particles in passing through matterJournal of Computers in Education, 1915