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Properties of Al2 O 3 Films Deposited from the AlCl3, CO 2, and H 2 System
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Publications
Properties of Al2 O 3 Films Deposited from the AlCl3, CO 2, and H 2 System
Properties of Al2 O 3 Films Deposited from the AlCl3, CO 2, and H 2 System
VS
V. J. Silvestri
V. J. Silvestri
CO
C. M. Osburn
C. M. Osburn
DO
D. W. Ormond
D. W. Ormond
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1 June 1978
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 125
(6)
,
902-907
https://doi.org/10.1149/1.2131588
Abstract
No abstract available
Cited by 38 articles