Frequency dependence of the lifetime of a surface micromachined microengine driving a load
- 1 March 1999
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 39 (3), 401-414
- https://doi.org/10.1016/s0026-2714(98)00248-0
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- How Third-Body Processes Affect Friction and WearMRS Bulletin, 1998
- The relationship between microstructure and wear of mica-containing glass-ceramicsWear, 1996
- Surface micromachined microengineSensors and Actuators A: Physical, 1995